1.產品品名ID命名是依基板材料,尺寸,鉻膜種類,光阻種類以及厚度定義。具體說明如下:

SL
 
700X800X8.0
 
L
 
AZ1500
 
1U

SL: soda lime glass
Q: quartz
B: borofloat or TFT glass
QR: recycled Qz
SR: recycled soda lime glass
BR: recycled borofloat

Size: short side x long side x thickness

Cr-film types:
Soda: S or L
Qz: A or N
Others: H, 2L
etc..

Resist type:
AZ1500
AZ1505
TFP650
IP3500
RZJ304

Thickness:
1U: 1um
50: 5000Å
53: 5300Å
70: 7000Å
22U: 2.2um

2.CF grade Qz800920,700800
CF Qz700x800/800x920x8t Blanks

Film Type Chrome Low reflective Double-side
Low reflective
Quartz Substrate Size 700x800x8t, 800×920×8t mm
If you need other size, please contact us. Quality area 20mm
Optical Density 3.8 ±0.4 3.8 ±0.4(within plate and p-to-p) 3.8 ±0.4
Reflectivity(λ=436nm) 55% 10±5% 10±5%
Thickness 1000 ±100Å 1250 ±125Å 1550 ±150Å
Pinhole Not limited <5µm
< 0.01pcs/cm2 as 5~10µm
Not allowed > 10µm (AOI Takano scan)
Etching Time 90±10sec 90±10sec 90±10se

TFT Qz Blank Specification

Film Type Chrome Low reflective Double-side
Low reflective
Quartz Substrate Size 520×800×10t mm(TFT grade)
If you need other size, please contact us. Quality area 20mm
Optical Density 3.8 ±0.4 3.8 ±0.3(within plate and p-to-p) 3.8 ±0.4
Reflectivity(λ=436nm) 55% 10±5%
Or 12±3%
10±5%
Thickness 1000 ±100Å 1250 ±125Å 1550 ±150Å
Pinhole Not limited <2µm
< 0.01pcs/cm2 as 2~5µm
Not allowed > 5µm (AOI Takano scan)
Etching Time 90±10sec 90±10sec 90±10se

3.確保針孔規格AOI系統