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application fields
mask blanks
Quartz and Sodalime substrates
Substrate type, size and specifications
micro patterning
Nanoimprint Molds
Glass mold
MEMS production
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mask coating
AS coating for mask
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Products
Cr mask blank
glass mold stamper
lens
patterned mask(copy mask)
AS(AF) mask coating
Substrates
Soda lime
Quartz
Borofloat
Others
Sizes
4/5/6/7/9 inch
14 inch
2024 / 2424 / 2428 inch
620x720
700x800 / 800x960
Others
Cr-film types
LR 100nm / OD3.0
LR 125nm / OD 3.8
HR 125nm / OD 3.8
HR 250nm / OD >5.0
Others
Thickness
1.5t
2.3t
3.0t
4.8 / 5.0 t
6.35 t
7.8 / 8.0 t
Others
Resist type
AZ1500
TFP650
AZ1505
Others
0.5um
0.7um
1.0um
Others
Minimum Patterns CD
5um
10um
≧20um
Details of inquiry
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